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Development Club

mechatronica, sensoren, embedded software en industrieel ontwerp

EUV Source Qualification Tool

8 mei, 2014 door TMC Electronics B.V.

5-603x263The NTS-Group helps international machine builders to accelerate their production processes. Its international branches develop, manufacture and assemble high-grade opto-mechatronic systems, modules and components. Its high-tech chain forms the basis for providing clients with the opportunity to achieve shorter lead times and to deliver competitively priced, high-quality machines.

A division of the NTS group called NTS systems development was formed to help NTS developing from being only a supplier towards becoming a supplier that also provides maintenance and development services to its customers. This division specializes in working with multi-disciplinary teams on high-tech projects.

The team for this project consisted of a physicist, a software architect, mechanical and electronic designers and was completed by TMC with a mechanical and electrical architect.

Together, they designed an eUV source qualification tool, which is a production tool that qualifies eUV sources by measuring the quality of the light output of the eUV source under test. As the next generation of lithographic machines will be powered by eUV light, different companies are currently developing eUV light sources. The source qualification tool is used to test light sources before they are connected to a lithographic machine. eUV technology is quite new and the TMC experts were hired for their flexibility and pragmatic way of solving the problems encountered when developing new technologies.

6The TMC team provided the NTS team with knowledge about high-tech lithographic machines and customer specific guidelines. The experts also transferred their knowledge and know-how about developing for clean rooms, necessary for keeping pollution out of the system, which contains a deep vacuum on the inside. eUV light is absorbed by any material and thus is only usable in a state of deep vacuum.

The electronics architect’s tasks were to find out which aspects of the tool had to be controlled, to choose the measuring sensors (in close cooperation with the physicist) and, most importantly, to make sure that the sensors and control of various motors could be linked together.

For the electronics architect, there were two specific challenges in this project.

The cooling of the electronics in the vacuum part of the tool and the tool specific EMC (Electromagnetic compatibility) were challenges, because of the high eUV light pulses secondary electrons that are generated when the photons hit a metal object and will cause high voltage spikes. During these high voltage spikes the sensors must still be able to measure very small voltages accurately without being influenced by high voltage spikes.

Categorie: High tech equipment, Industrial Design, Nieuws Tagged: electrical, mechnical, TMC

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TMC Electronics B.V.

Driven electronics experts, that is what we stand for at TMC Electronics. Driven to turn the challenges our customers face into effective solutions. To achieve that, every Employeneur has developed his own specialisation within Electronics and Electrical Engineering over the years. All at a professional and/or academic level.

At the same time TMC Employeneurs are extremely curious. They like to look beyond the boundaries of their own domain and prefer to work in multidisciplinary environments. Simply because they can.

TMC Employeneurs effortlessly find their way to and within the core activities of the various R&D departments in the Dutch high-tech industry. Because of their unique expertise and their drive TMC Employeneurs are usually part of a strategic team. More often than not they are one of the driving forces or they fulfil the role of project leader.

In the projects our Employeneurs are in-sourced for, the trick lies in predicting the needs of the end customer. Of course, it is wonderful when our Employeneurs can bring a positive contribution to that process. It is our ambition to come up with and make solutions whilst relieving the customer of any worry or hassle.

TMC Electronics’s clients include ASML, DAF, FEI, Mutracx, NXP, Océ, Philips and TNO.

Email: roger.hacking@tmc.nl

Website: https://tmc-employeneurship.com/nl/nanotechnology

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