A lithography machine has several moving platforms with sensors that should be wirelessly connected to a central control computer. For autonomy, each sensor comes in a package that includes its own clock and power supply. To accurately track e.g. a temperature profile, it is then necessary to wirelessly synchronize the sensors to a common clock.
How can this be done, in view of the unknown propagation delays and different clock parameters?
|Alle Jan van der Veen, Delft University of Technology