GF introduces SYGEF Ultra, a high-purity PEEK piping system for the transport of ultrapure water specifically for the next generation of semiconductor production. Tests show that the system can reduce purge time by approximately 80% compared to conventional high-purity PVDF systems, allowing installations to be commissioned faster.

The growth of AI and high-performance computing is leading to an increase in semiconductor production. Chip designs are becoming smaller and more complex. As a result, even greater emphasis is placed on minimizing contamination. Even very small contaminants can affect process stability and yield. The yield is the percentage of working chips produced from a wafer.

Minimal contamination in the distribution of ultrapure water (UPW) is therefore essential. The SYGEF Ultra piping system helps producers meet stringent purity requirements for (hot) ultrapure water, maximize yield, ensure operational reliability, and be prepared for future technological developments. Furthermore, the use of high-purity PEEK aligns with expected changes in future regulations.

High purity and faster commissioning

The basis of SYGEF Ultra is high-purity polyetheretherketone (PEEK), a high-performance plastic that combines mechanical strength at higher temperatures with impact resistance and chemical resistance. The low leach-out and smooth inner surface exceed the requirements of the SEMI F57 standard for high-purity polymeric materials and components in ultrapure water distribution systems.

Tests show that the system can achieve the required water quality within a few days. This reduces flushing time by approximately 80% compared to conventional high-purity PVDF systems, leading to more efficient commissioning with reduced consumption of agents and additives. SYGEF Ultra is designed for an expected service life of at least 25 years under the intended operating conditions and is manufactured from PEEK-HP, a PFAS-free* material.

SYGEF Ultra wordt geproduceerd en verpakt onder ISO-klasse 7-cleanroomomstandigheden (klasse 10.000), binnen een speciaal ingerichte productieketen voor high-purity toepassingen.
SYGEF Ultra is produced and packaged under ISO Class 7 cleanroom conditions (Class 10,000), within a specially designed production chain for high-purity applications. Source: GF

Why is PEEK a PFAS-free material?

The Organisation for Economic Co-operation and Development (OECD) defines PFAS as [1] fluorinated substances containing at least one fully fluorinated methyl or methylene carbon atom, without a hydrogen, chlorine, bromine or iodine atom bonded to it. With a few exceptions, this means substances containing at least one perfluoromethyl group (–CF₃) or perfluoromethylene group (–CF₂–). This OECD definition is also used in the current version of the Annex XV restriction proposal [2] submitted under Regulation (EC) No 1907/2006 (REACH).

SYGEF Ultra is a piping system made of polyetheretherketone (PEEK). The PEEK raw material used for production does not fall under the above-mentioned OECD definition of PFAS – and is therefore PFAS-free. However, commonly used sealing and gasket materials, such as fluoroelastomers (FKM) and polytetrafluoroethylene (PTFE), are fluorinated materials. Therefore, the entire SYGEF Ultra piping system cannot be classified as PFAS-free.

[1] OECD (2021), Reconciling Terminology of the Universe of Per- and Polyfluoroalkyl Substances: Recommendations and Practical Guidance, OECD Series on Risk Management, No. 61, OECD Publishing, Paris.

[2] European Chemicals Agency (ECHA) (2023), Per- and Polyfluoroalkyl Substances (PFAS) Restriction Proposal under REACH, Restrictions under Consideration, European Chemicals Agency, Helsinki.

You can find more information about SYGEF Ultra on the GF website: https://www.gfps.com/nl-nl/products-solutions/innovation/sygef-ultra.html

 

FHI, Federatie van technologiebranches