About Us

Process control is the key to taking your production beyond ordinary and achieving new levels of performance. To control any process, you must first measure it precisely.

This is what makes Brooks Instrument the global leader in precision fluid measurement and control technology. We enable precision process performance. We deliver results that consistently create a competitive advantage for our customers. In heavy industry. In oil and gas refining. Chemical and petrochemical research. Pharmaceutical and biopharmaceutical production. Solar cell, LED, thin film, fiber optic and semiconductor manufacturing. And beyond. 

Proven performance

Brooks Instrument is a trusted partner because our flow, pressure and vaporization instrumentation is more than accurate. It is reliable. Stable. Repeatable. Durable. It’s proven year after year, decade after decade, in the most demanding industrial and electronic manufacturing systems. It continuously incorporates innovations that move measurement and control technology to new levels of flexibility and precision.

• World’s largest installed base of mass flow controllers; one of the most trusted suppliers of mass flow technology to the global semiconductor industry.
• Brooks holds over 200 granted patents and patent pending applications. Our product portfolio incorporates multiple patented advances in fundamental fluid measurement and control technology.
• Innovative companies such as UNIT Instruments, Tylan, and Celerity, pioneers in developing MFC technology as well as pressure measurement and control technology, are now part of the broad family of Brooks products.
• Many Brooks products are available with national laboratory-calibration traceability and certification, recognized hazardous area approvals, pressure boundary certifications, material certifications and more.

Focused expertise

The performance of our devices is fully matched by our technical and application expertise. Our instrumentation engineers and application specialists focus on solving real-world process challenges. They can help you select and configure the optimum combination of flow, pressure and vacuum devices that raise the performance and results (yield, throughput, etc.) of your systems and processes to new levels.

We then support those products through their operational lifetime through a growing global network of factory-certified service and calibration centers, ready to care for your Brooks devices and keep your uptime levels as high as possible.

Decades of innovation

Since 1946, starting as a single instrumentation company, Brooks Instrument has been a leader in the market with groundbreaking fluid measurement and control technologies. Explore our history.

Our parent: ITW

Brooks Instrument is a division of ITW (Illinois Tool Works), a Fortune 200 company. ITW is one of the world’s leading diversified manufacturers of specialized industrial equipment, consumables and related service businesses. The company has prospered for over 100 years because each of ITW’s businesses has an independent entrepreneurial spirit and freedom to innovate. It’s the highly talented people at ITW all over the world who drive our success through new products and customer-driven solutions.